著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Jones, Erin C. and Jones, Kevin S. and Giles, Martin D. and Stolk, Peter and Matsuo, Jiro","Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.",,Materials Research Society,2001,Materials Research Society symposium proceedings,,1558996052,,https://cir.nii.ac.jp/crid/1130000798232329216