著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Jerke, John M.",Optical and dimensional-measurement problems with photomasking in microelectronics,,U.S. G.P.O.,1975,NBS special publication,,,,https://cir.nii.ac.jp/crid/1130000798273299328