著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Bagdahn, Jörg and Materials Research Society. Meeting and Microelectromechanical Systems--Materials and Devices","Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.",,Materials Research Society,2010,Materials Research Society symposium proceedings,,9781605111957,,https://cir.nii.ac.jp/crid/1130000798279950464