著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Murarka, S. P.","Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.",,Materials Research Society,1994,Materials Research Society symposium proceedings,,1558992375,,https://cir.nii.ac.jp/crid/1130000798394210048