著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Hartzell, Allyson L. and Ramesham, Rajeshuni and Society of Photo-optical Instrumentation Engineers","Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23-24 January, 2007, San Jose, California, USA",,SPIE,2007,Proceedings,,9780819465764,,https://cir.nii.ac.jp/crid/1130003901164100864