著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Photomask and Next-Generation Lithography Mask Technology and Watanabe, Hidehiro and Photomask Japan and BACUS (Technical group) and Society of Photo-optical Instrumentation Engineers","Photomask and next-generation lithography mask technology XIV : 17-19 April 2007, Yokohama, Japan",,SPIE,2007,Proceedings,,,,https://cir.nii.ac.jp/crid/1130004954719259776