著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Integrated Circuit Metrology, Inspection, and Process Control Symposium and Bennett, Marylyn Hoy and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International","Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California",,SPIE,1995,Proceedings,,0819417874,,https://cir.nii.ac.jp/crid/1130006265899292037