著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Jones, Susan K. and Society of Photo-optical Instrumentation Engineers and SPIE Conference on Metrology, Inspection, and Process Control for Microlithography","Metrology, inspection, and process control for microlithography X : 11-13 March, 1996, Santa Clara, California",,SPIE,1996,Proceedings,,0819421014,,https://cir.nii.ac.jp/crid/1130006265935321764