著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Chen, Ih-Chin and Society of Photo-optical Instrumentation Engineers","Microelectronic device and multilevel interconnection technology : 25-26 October 1995, Austin, Texas",,SPIE,1995,Proceedings,,0819420026,,https://cir.nii.ac.jp/crid/1130006265935321882