著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Roop, Ray and Chau, Kevin and Semiconductor Equipment and Materials International and Society of Photo-optical Instrumentation Engineers and United States. National Institute of Standards and Technology","Micromachined devices and components : 23-24 October, 1995, Austin, Texas",,SPIE,1995,Proceedings,,0819420085,,https://cir.nii.ac.jp/crid/1130006265935322531