著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Fuller, Gene E. and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International and SEMATECH (Organization)","Optical microlithography X : 12-14 March, 1997, Santa Clara, California",,SPIE,1997,Proceedings,,081942465X,,https://cir.nii.ac.jp/crid/1130006418369080617