著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Prasad, Sharad and Hartmann, Hans-Dieter and Tsujide, Tohru and Society of Photo-optical Instrumentation Engineers","Microelectronic manufacturing yield, reliability, and failure analysis IV : 23-24 September, 1998, Santa Clara, California",,SPIE,1998,Proceedings,,0819429694,,https://cir.nii.ac.jp/crid/1130006650862834050