著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Gorecki, Christophe and European Optical Society and Society of Photo-optical Instrumentation Engineers","Microsystems metrology and inspection : 15-16 June 1999, Munich, Germany",,SPIE,1999,Proceedings,,081943311X,,https://cir.nii.ac.jp/crid/1130006728161289871