著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Lawton, Russell A. and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International and SolidState Technology (Organization) and Sandia National Laboratories","MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA",,SPIE,2000,Proceedings,,0819438367,,https://cir.nii.ac.jp/crid/1130006728475012626