著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Okada, Tatsuo and Society of Photo-optical Instrumentation Engineers and Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing","Photon processing in microelectronics and photonics V : 23-26 January, 2006, San Jose, California, USA",,SPIE,2006,Proceedings,,0819461482,,https://cir.nii.ac.jp/crid/1130007425204151825