著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Gusev, E. P.","Advanced gate stack, source/drain, and channel engineering for si-based CMOS 6 : new materials, processes, and equipment",,Electrochemical Society,2010,ECS transactions,,9781566777919,,https://cir.nii.ac.jp/crid/1130009670188468623