著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Tanner, Danelle Mary and Ramesham, Rajeshuni and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International and Solid State Technology (Organization) and Sandia National Laboratories","Reliability, packaging, testing, and characterization of MEMS/MOEMS IV : 24-25 January 2005, San Jose, California, USA",,SPIE,2005,Proceedings,,081945690X,,https://cir.nii.ac.jp/crid/1130011528893911314