著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Jin, Guofan and McKillop, John S. and Hane, Kazuhiro and Society of Photo-optical Instrumentation Engineers and Chinese Optical Society and 上海交通大学 and National Natural Science Foundation of China","MEMS/MOEMS technologies and applications : 17-18 October, 2002, Shanghai, China",,SPIE,2002,Proceedings,,081944717X,,https://cir.nii.ac.jp/crid/1130011528893911431