著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Peckerar, Martin Charles and Society of Photo-optical Instrumentation Engineers","Electron-beam, x-ray, and ion-beam submicrometer lithographies for manufacturing II : 8-9 March 1992, San Jose, California",,SPIE,1992,Proceedings,,0819408263,,https://cir.nii.ac.jp/crid/1130282268755472256