著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Gilleo, Ken","MEMS/MOEMS packaging : concepts, designs, metarials, and processes",,McGraw-Hill,2005,McGraw-Hill nanoscience and technology series,,0071455566,,https://cir.nii.ac.jp/crid/1130282268785740800