著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Stover, Harry L. and Society of Photo-optical Instrumentation Engineers","Optical microlithography II : technology for the 1980s : March 16-17, 1983, Santa Clara, California",,SPIE--the International Society for Optical Engineering,1983,Proceedings,,0892524294,,https://cir.nii.ac.jp/crid/1130282268786856960