著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Campbell, Stephen A.",Fabrication engineering at the micro- and nanoscale,4th ed,Oxford University Press,2013,The Oxford series in electrical and computer engineering,,9780199861224,,https://cir.nii.ac.jp/crid/1130282268797320960