著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Society of Photo-optical Instrumentation Engineers and Allen, Rober D.","Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California",,SPIE,1995,Proceedings,,0819417866,,https://cir.nii.ac.jp/crid/1130282268815302016