著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Amberiadis, Kostas and European Optical Society and Society of Photo-optical Instrumentation Engineers and European Commission. Directorate-General XII, Science, Research, and Development and Scottish Enterprise and Sira Technology Centre (U.K.) and Institution of Electrical Engineers","In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland",,SPIE,1999,Proceedings,,0819432237,,https://cir.nii.ac.jp/crid/1130282268885489152