著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Chiao, Jung-Chih and Varadan, Vijay K. and Cané, Carles","Smart sensors, actuators, and MEMS : 19-21 May 2003, Maspalomas, Gran Canaria, Spain",,SPIE,2003,Proceedings,,"0819449768,0819449768",,https://cir.nii.ac.jp/crid/1130282268906668416