著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Symposium on Automated Integrated Circuits Manufacturing and Anthony, Joseph B. and Electrochemical Society. Electronics Division and Electrochemical Society. Dielectrics and Insulation Division",Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing,,Electrochemical Society,1988,Proceedings,,,,https://cir.nii.ac.jp/crid/1130282268908849920