著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Wortman, Jimmie J.","Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.",,Materials Research Society,1994,Materials Research Society symposium proceedings,,1558992421,,https://cir.nii.ac.jp/crid/1130282268915425792