著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Rossnagel, Stephen M. and Cuomo, J. J. and Westwood, William D. (William Dickson)","Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions",,Noyes Publications,1990,Materials science and process technology series,,0815512201,,https://cir.nii.ac.jp/crid/1130282268959565696