著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Design, Test, Integration, and Packaging of MEMS/MOEMS (Conference) and Courtois, B. (Bernard) and Centre national de la recherche scientifique (France)","Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France",,SPIE,2002,Proceedings,,0819445185,,https://cir.nii.ac.jp/crid/1130282269046448128