著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "International Vacuum Congress and Redhead, P. A. and American Vacuum Society and Ehrlich, G. and Hoffman, R. W. and Baker, Jill and International Union of Vacuum Science, Technology and Application",Fifth International Vacuum Congress proceedings issue,,The American Institute of Physics,1972,Journal of vacuum science & technology,,,,https://cir.nii.ac.jp/crid/1130282269139037568