著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Campbell, S.A. and Clevenger, L.A. and Griffin, P.B. and Hobbs, C.C.","Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A.",,Materials Research Society,2002,Materials Research Society symposium proceedings,,1558996060,,https://cir.nii.ac.jp/crid/1130282269147116288