著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Blais, Phillip D. and International Society for Hybrid Microelectronics and Northern California Microphotomask/Masking Working Group and Materials Research Society",Submicron lithography,,International Society for Optical Engineering,1982,Proceedings,,0892523689,,https://cir.nii.ac.jp/crid/1130282269153390464