著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Thompson, L. F. and Willson, C. G. (C. Grant) and Bowden, M. J. and American Chemical Society. Division of Polymeric Materials : Science and Engineering and American Chemical Society. Meeting","Introduction to microlithography : theory, materials, and processing",,The American Chemical Society,1983,ACS symposium series,,0841207755,,https://cir.nii.ac.jp/crid/1130282269155489664