著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Griffiths, James E. and Society of Photo-optical Instrumentation Engineers","Monitoring and control of plasma-enhanced processing of semiconductors : proceedings : 1-2 November 1988, Santa Clara, California",,SPIE,1989,Proceedings,,0819400726,,https://cir.nii.ac.jp/crid/1130282269185684864