著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "Kolbesen, Bernd O. and Mc Caughan, Daniel V. and Vandervorst, Wilfried and Electrochemical Society. Electronics Division and European Solid State Device Research Conference and Symposium on Analytical Techniques for Semiconductor Materials and Process Characterisation",Analytical techniques for semiconductor materials and process characterization : proceedings of the satellite symposium to ESSDERC 89 Berlin,,Electrochemical Society,1990,Proceedings,,,,https://cir.nii.ac.jp/crid/1130282269197160192