著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Society of Photo-optical Instrumentation Engineers and Chiao, Jung-Chih and Fraone, Lorenzo and Harrison, H. Barry and Shkel, Andrei M.","Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia",,SPIE--the International Society of Optical Engineering,2001,Proceedings,,0819443220,,https://cir.nii.ac.jp/crid/1130282269221562496