著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Rana, Virendra Vir Singh and Joshi, Rajiv V. and 大泊, 巌 and University of California, Berkeley. Continuing Education in Engineering and Advanced Metallization for ULSI Applications Conference","Advanced metallization for ULSI applications (formerly workshop on tungsten and other advanced metals for ULSI applications) : proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan",,Materials Research Society,1992,Materials Research Society conference proceedings,,1558991522,,https://cir.nii.ac.jp/crid/1130282269258964736