著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Dobisz, Elizabeth Ann and Society of Photo-optical Instrumentation Engineers and Semiconductor Equipment and Materials International and International SEMATECH","Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA",,SPIE,2000,Proceedings,,0819436151,,https://cir.nii.ac.jp/crid/1130282269291033856