著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Mack, Chris A. and Stevenson, Tom and Society of Photo-optical Instrumentation Engineers and Scottish Enterprise and European Optical Society and Institution of Electrical Engineers","Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK",,SPIE,2001,Proceedings,,0819441058,,https://cir.nii.ac.jp/crid/1130282269314038016