著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "International Conference on Materials for Advanced Technologies and Khine, Lynn and Tsai, Julius M.","NEMS/MEMS technology and devices : selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS/MEMS and microTAS June 26- July 1, 2011, Suntec, Singapore",,Trans Tech Publications,2011,Advanced materials research,,9783037851456,,https://cir.nii.ac.jp/crid/1130282269326519680