著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Seeger, David E. and Society of Photo-optical Instrumentation Engineers","Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California",,SPIE,1997,Proceedings,,0819424625,,https://cir.nii.ac.jp/crid/1130282269331994752