著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"難波, 進 and Tsurushima, T. and 応用物理学会 and American Vacuum Society and IEEE Electron Devices Society","MicroProcess 91 : proceedings of the 1991 International MicroProcess Conference, July 15-18, 1991, Kanazawa, Japan",,"Publication Office, Japanese Journal of Applied Physics",1992,JJAP series,,4900526053,,https://cir.nii.ac.jp/crid/1130282269343324928