著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL "花泉, 修 and 海野, 雅史",Silicon science and advanced micro-device engineering,,Trans Tech Pub.,2011,Key engineering materials,,9780878492176,,https://cir.nii.ac.jp/crid/1130282269426700032