著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL Symposium on Photomask Technology and Management and BACUS (Technical group) and Society of Photo-optical Instrumentation Engineers,"12th Annual Symposium on Photomask Technology and Management : 23-24 September 1992, Sunnyvale, California",,SPIE,1993,Proceedings,,0819410098,,https://cir.nii.ac.jp/crid/1130282269429867264