著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Soh, Hyongsok T. and Guarini, Kathryn Wilder and Quate, Calvin F.",Scanning probe lithography,,Kluwer Academic Publishers,2001,Microsystems,,0792373618,,https://cir.nii.ac.jp/crid/1130282269442309120