著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Gupta, D. C. (Dinesh C.) and Symposium on Semiconductor Processing (5th : 1988 : Santa Clara, Calif.) and ASTM Committee F-1 on Electronics and Semiconductor Equipment and Materials International",Semiconductor fabrication : technology and metrology,,ASTM,1989,ASTM special technical publication,,0803112734,,https://cir.nii.ac.jp/crid/1130282269469139840