著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Fukuda, T. (Toshio) and Menz, W. (Wolfgang)",Micro mechanical systems : principles and technology,,Elsevier,1998,Handbook of sensors and actuators,,0444823638,,https://cir.nii.ac.jp/crid/1130282269470946176