著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"International Symposium on Cleaning Technology in Semiconductor Device Manufacturing and Hattori, Takeshi and Novak, Richard E. and Rużyłło, Jerzy and Electrochemical Society. Electronics and PhotonicsDivision",Cleaning and surface conditioning technology in semiconductor device manufacturing 10,,Electrochemical Society,2007,ECS transactions,,"9781566775687,9781566775809",,https://cir.nii.ac.jp/crid/1130282269508359552