著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Yallup, Kevin and Narasimhan, Murali K. and European Optical Society and Society of Photo-optical Instrumentation Engineers and European Commission. Directorate-General XII, Science, Research, and Development","Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland",,SPIE,1999,Proceedings,,0819432229,,https://cir.nii.ac.jp/crid/1130282269552387712