著者名,書名,版表示,出版者名,出版年,シリーズ名,番号,ISBN,ISSN,URL
"Helvajian, Henry and Janson, Siegfried W. and Lärmer, Franz and Society of Photo-optical Instrumentation Engineers and United States. Defense Advanced Research Projects Agency","MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA",,SPIE,2001,Proceedings,,0819442879,,https://cir.nii.ac.jp/crid/1130282269561824384